Authors » Abstract Categories

  1. Materials, Fabrication and Packaging for Generic MEMS & NEMS
    1.01 Materials for MEMS & NEMS
    1.02 Generic MEMS & NEMS Manufacturing Techniques
    1.03 Digital Micromanufacturing (Laser Micromachining, Additive Manufacturing)
    1.04 Packaging & Assembly

  2. Micro- & Nanofluidics
    2.01 Materials for Micro & Microfluidics
    2.02 Manufacturing for Micro- and Nanofluidics
    2.03 Generic Microfluidics & Nanofluidics
    2.04 Biological and Medical Microfluidics and Nanofluidics
    2.05 Integrated/Embedded Microfluidics and Nanofluidic Systems & Platforms
    2.06 Other Micro- and Nanofluidics

  3. Bio & Medical MEMS
    3.01 Materials for Bio- and Medical MEMS
    3.02 Manufacturing for Bio- & Medical MEMS & Microfluidics
    3.03 Nanobiotechnology
    3.04 Biosensors and Bioreactors
    3.05 Tissue Engineering
    3.06 Medical Microsystems (Probes, Implantables, Minimally Invasive, Etc.)
    3.07 Other Bio and Medical MEMS

  4. MEMS Physical Sensors
    4.01 Materials for Physical Sensors
    4.02 Manufacturing Techniques for Physical Sensors
    4.03 Nanoscale Physical Sensors
    4.04 Inertial Sensors (Gyros, Accelerometers, Resonators, Etc.)
    4.05 Fluidic Sensors (Flow, Pressure, Density, Viscosity, Etc.)
    4.06 Sonic & Ultrasonic MEMS Transducers (Microphones, PMUTs, Etc.)
    4.07 Gas & Chemical Sensors
    4.08 Force & Displacement Sensors (Tactile, Force, Torque, Stress & Strain Sensor)
    4.09 Other Physical Sensors

  5. Optical, RF and Electromagnetics for MEMS
    5.01 Materials for Electromagnetic Transducers
    5.02 Manufacturing for Electromagnetic Transducers
    5.03 NEMS for Electromagnetic Transducers
    5.04 DC & Low Frequency Magnetic & Electrochemical Components & Systems
    5.05 RF MEMS Components & Systems
    5.06 MEMS for Timing & Frequency Control
    5.07 THz MEMS Components & Systems
    5.08 Photonic Components & Systems
    5.09 Free Space Optical Components & Systems (Displays, Lenses, Detectors)
    5.10 Other Electromagnetic MEMS

  6. MEMS Actuators & PowerMEMS
    6.01 Materials for Actuators & PowerMEMS
    6.02 Manufacturing for Actuators & PowerMEMS
    6.03 Nanoscale Actuators & PowerMEMS
    6.04 Actuator Components & Systems
    6.05 PowerMEMS Components & Systems
    6.06 Other Actuators & PowerMEMS

  7. Technical Topics on MEMS Products
    7.01 Methods of Product Comparison
    7.02 Measurement Methods for Product Specs
    7.03 MEMS vs. Macro: Pros and Cons of Miniaturization in Actual Products
    7.04 Barriers to Commercialization & Research Needs for Future Products
    7.05 Fabrication Models for Products


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